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Manual Aligner. The SUSS MA6 Mask Aligner is regarded as the benchmark in semiconductor submicron research and 3D After cooling, the samples were ultraviolet (UV) exposed on a mask aligner (MA6 Suss MicroTec, Munich, Germany) with an exposure dose of 250 mJcm 2 through an iline filter (G Suss MicroTec, Munich, Germany) and a photolithographic mask (chrome on soda lime glass, JD Phototools, Oldham, UK).
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Center for Nanoscale Systems. Harvard University Karl Suss MA6 Mask Aligner User Manual If anything unusual, contact Ling Xie @, or Steve Shepard @. Manual MA6 Download as PDF File (. pdf), Text File (. txt) or read online. mask aligner ma6 Once the mask and wafer are loaded the aligner proceeds to expose skipping the alignment step. 7. 4. Alignment Features. Top side: TSA, the top microscope is used to align mask features to the topside of the wafer. Find great deals on eBay for mask aligner.
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